Damage formation in Ge during Ar+ and He+ implantation at 15 K

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Authors

Hayes, M.
Schroeter, A.
Wendler, E.
Wesch, W.
Auret, Francois Danie
Nel, Jacqueline Margot

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Elsevier

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Keywords

Implantation, RBS, Channelling, Ge

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Citation

M.Hayes, et al., Physica B (2009), doi:10.1016/j.physb.2009.09.021