A comparison of basic 94 GHz planar transmission line resonators in commercial BiCMOS back-end-of-line processes

dc.contributor.emailtinus.stander@ieee.orgen_ZA
dc.contributor.otherInternational Conference on Actual Problems of Electron Devices Engineering (APEDE), 2014: Saratov
dc.contributor.upauthorStander, Tinus
dc.date.accessioned2015-10-07T06:57:35Z
dc.date.available2015-10-07T06:57:35Z
dc.date.issued2014
dc.descriptionPaper presented at the 2014 International Conference on Actual Problems of Electron Devices Engineering (APEDE), 25-26 Sept. 2014, Saratov.en_ZA
dc.description.abstractA comparative simulation study of planar 94 GHz resonators in a typical BiCMOS BEOL stack-up is presented, with the effect of chip passivation included. It is shown that Q-factors of between 3 and 15 can be obtained, depending on transmission medium and ground plane layer choice. Straight half-wavelength and shorted quarter-wavelength microstrip resonators are shown to outperform CPW, GCPW and hairpin resonators, with highest Q-factors obtained where the lowest available metallization layer is used as ground plane. Q-factors of above 10 may also be achieve in the absence of any ground plane in CPW, which may be implemented in processes (such as GaAs or GaN) where multiple metallization layers are not readily available.en_ZA
dc.description.librarianhb2015en_ZA
dc.description.urihttp://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=6940442en_ZA
dc.identifier.citationStander, T 2014, 'A comparison of basic 94 GHz planar transmission line resonators in commercial BiCMOS back-end-of-line processes', 2014 International Conference on Actual Problems of Electron Devices Engineering (APEDE), 25-26 Sept. 2014, pp. 185-192.en_ZA
dc.identifier.isbn978-1-4799-3437-9
dc.identifier.other10.1109/APEDE.2014.6958743
dc.identifier.urihttp://hdl.handle.net/2263/50170
dc.language.isoenen_ZA
dc.publisherInstitute of Electrical and Electronics Engineersen_ZA
dc.rights© 2014 IEEEen_ZA
dc.subjectComparative simulation studyen_ZA
dc.subjectPlanar 94 GHz resonatorsen_ZA
dc.subjectTypical BiCMOS BEOL stack-upen_ZA
dc.titleA comparison of basic 94 GHz planar transmission line resonators in commercial BiCMOS back-end-of-line processesen_ZA
dc.typePresentationen_ZA

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